Tin nitride thin films fabricated by reactive radio frequency magnetron sputtering at various nitrogen gas ratios

Published 2014 View Full Article

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Title
Tin nitride thin films fabricated by reactive radio frequency magnetron sputtering at various nitrogen gas ratios
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 571, Issue -, Pages 84-89
Publisher
Elsevier BV
Online
2014-10-16
DOI
10.1016/j.tsf.2014.10.035

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