Microstructure and piezoelectric response of YxAl1−xN thin films

Published 2015 View Full Article

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Title
Microstructure and piezoelectric response of YxAl1−xN thin films
Authors
Keywords
Yttrium aluminum nitride, Piezoelectric, d, 33, PFM, Reactive sputtering
Journal
ACTA MATERIALIA
Volume 100, Issue -, Pages 81-89
Publisher
Elsevier BV
Online
2015-08-29
DOI
10.1016/j.actamat.2015.08.019

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