Unveiling the role of dielectric trap states on capacitively coupled radio-frequency plasma discharge: dynamic charging behaviors
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Title
Unveiling the role of dielectric trap states on capacitively coupled radio-frequency plasma discharge: dynamic charging behaviors
Authors
Keywords
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Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 30, Issue 5, Pages 055007
Publisher
IOP Publishing
Online
2021-03-30
DOI
10.1088/1361-6595/abf321
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