Unveiling the role of dielectric trap states on capacitively coupled radio-frequency plasma discharge: dynamic charging behaviors
出版年份 2021 全文链接
标题
Unveiling the role of dielectric trap states on capacitively coupled radio-frequency plasma discharge: dynamic charging behaviors
作者
关键词
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出版物
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 30, Issue 5, Pages 055007
出版商
IOP Publishing
发表日期
2021-03-30
DOI
10.1088/1361-6595/abf321
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