Patterned growth of β-Ga2O3 thin films for solar-blind deep-ultraviolet photodetectors array and optical imaging application

Title
Patterned growth of β-Ga2O3 thin films for solar-blind deep-ultraviolet photodetectors array and optical imaging application
Authors
Keywords
Ultrawide-bandgap semiconductor, Solar-blind, Deep ultraviolet photodetection, Patterned growth, Image sensor
Journal
JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY
Volume 72, Issue -, Pages 189-196
Publisher
Elsevier BV
Online
2020-09-29
DOI
10.1016/j.jmst.2020.09.015

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