Journal
APPLIED SURFACE SCIENCE
Volume 489, Issue -, Pages 101-109Publisher
ELSEVIER
DOI: 10.1016/j.apsusc.2019.05.328
Keywords
Epitaxial beta-Ga2O3 films; Pulsed laser deposition; Growth temperature effects; Metal-semiconductor-metal structure; Solar-blind photodetectors
Categories
Funding
- National Natural Science Foundation of China [61274010, 51572073, 11574074, 11774082]
- Natural Science Foundation of Hubei Province [2016AAA031, 2018CFB700]
- Wuhan Application Foundation Frontier Project [2018010401011287]
- State Key Laboratory of Advanced Technology for Materials Synthesis and Processing (Wuhan University of Technology) [2018-KF-16]
Ask authors/readers for more resources
High-quality (-201)-oriented beta-Ga2O3 thin films were epitaxially grown on c-sapphire substrates by pulsed laser deposition (PLD) at various substrate temperatures using a beta-Ga2O3 ceramic target. These films were then used to fabricate metal-semiconductor-metal (MSM) solar-blind photodetectors (PDs) based on an Au/beta-Ga2O3/Au structure. The crystal quality, atomic ratio of O/Ga, and bandgap of the beta-Ga2O3 films all increased with increasing growth temperature, causing the dark current and response time of the PDs to decrease dramatically. The PD based on the beta-Ga2O3 film grown at 700 degrees C exhibited the best performance, with a low dark current of 10.6 pA at 10 V and a high peak responsivity of 18.23 A/W (at 255 nm). Furthermore, the response time of the fabricated PD was fast (tau(rise): 0.062/0.379 s, tau(deacy): 0.058/0.663 s). These results represent the state-of-art performance in dark current for PLD-grown beta-Ga2O3-based MSM solar-blind detectors.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available