Highly preferred orientation of Ga2O3 films sputtered on SiC substrates for deep UV photodetector application

Published 2018 View Full Article

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Title
Highly preferred orientation of Ga2O3 films sputtered on SiC substrates for deep UV photodetector application
Authors
Keywords
Ga, 2, O, 3, film, Preferred orientation, Magnetron sputtering, Annealing, Deep ultraviolet detector
Journal
APPLIED SURFACE SCIENCE
Volume 471, Issue -, Pages 694-702
Publisher
Elsevier BV
Online
2018-12-06
DOI
10.1016/j.apsusc.2018.12.045

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