Combined Implications of UV/O3 Interface Modulation with HfSiOX Surface Passivation on AlGaN/AlN/GaN MOS-HEMT
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Title
Combined Implications of UV/O3 Interface Modulation with HfSiOX Surface Passivation on AlGaN/AlN/GaN MOS-HEMT
Authors
Keywords
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Journal
Crystals
Volume 11, Issue 2, Pages 136
Publisher
MDPI AG
Online
2021-01-28
DOI
10.3390/cryst11020136
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