Tuning plasma parameters to control reactive species fluxes to substrates in the context of plasma catalysis

Title
Tuning plasma parameters to control reactive species fluxes to substrates in the context of plasma catalysis
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 54, Issue 21, Pages 214005
Publisher
IOP Publishing
Online
2021-02-23
DOI
10.1088/1361-6463/abe89a

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