Tuning plasma parameters to control reactive species fluxes to substrates in the context of plasma catalysis
出版年份 2021 全文链接
标题
Tuning plasma parameters to control reactive species fluxes to substrates in the context of plasma catalysis
作者
关键词
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出版物
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 54, Issue 21, Pages 214005
出版商
IOP Publishing
发表日期
2021-02-23
DOI
10.1088/1361-6463/abe89a
参考文献
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