Recombination probability of oxygen atoms on dynamic stainless steel surfaces in inductively coupled O2 plasmas

Published 2008 View Full Article

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Title
Recombination probability of oxygen atoms on dynamic stainless steel surfaces in inductively coupled O2 plasmas
Authors
Keywords
-
Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 26, Issue 3, Pages 455-461
Publisher
American Vacuum Society
Online
2008-05-14
DOI
10.1116/1.2902953

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