Parameters optimization on surface roughness improvement of Zerodur optical glass using an innovative rotary abrasive fluid multi-jet polishing process

Published 2015 View Full Article

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Title
Parameters optimization on surface roughness improvement of Zerodur optical glass using an innovative rotary abrasive fluid multi-jet polishing process
Authors
Keywords
Abrasive fluid jet polishing, Multi-jet polishing, ANOVA, Surface roughness, Taguchi method, Zerodur
Journal
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
Volume 42, Issue -, Pages 93-100
Publisher
Elsevier BV
Online
2015-04-18
DOI
10.1016/j.precisioneng.2015.04.004

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