Structural and optical properties of low-temperature ZnO films grown by atomic layer deposition with diethylzinc and water precursors

Published 2008 View Full Article

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Title
Structural and optical properties of low-temperature ZnO films grown by atomic layer deposition with diethylzinc and water precursors
Authors
Keywords
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Journal
JOURNAL OF CRYSTAL GROWTH
Volume 311, Issue 4, Pages 1096-1101
Publisher
Elsevier BV
Online
2008-12-05
DOI
10.1016/j.jcrysgro.2008.11.086

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