Atomic layer deposition of palladium coated TiO2/Si nanopillars: ToF-SIMS, AES and XPS characterization study
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Title
Atomic layer deposition of palladium coated TiO2/Si nanopillars: ToF-SIMS, AES and XPS characterization study
Authors
Keywords
Silicon nanopillars, TiO, 2, Pd, Atomic layer deposition, Time-of-flight secondary ion mass spectrometry, X-Ray photoelectron spectroscopy, Auger spectroscopy
Journal
APPLIED SURFACE SCIENCE
Volume 542, Issue -, Pages 148603
Publisher
Elsevier BV
Online
2020-11-26
DOI
10.1016/j.apsusc.2020.148603
References
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