Optical properties of ZnO deposited by atomic layer deposition (ALD) on Si nanowires

Published 2018 View Full Article

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Title
Optical properties of ZnO deposited by atomic layer deposition (ALD) on Si nanowires
Authors
Keywords
Silicon nanowires (SiNWs), metal-assisted chemical etching (MACE), nanosphere lithography (NSL), atomic layer deposition (ALD), ZnO
Journal
Materials Science and Engineering B-Advanced Functional Solid-State Materials
Volume 236-237, Issue -, Pages 139-146
Publisher
Elsevier BV
Online
2018-11-28
DOI
10.1016/j.mseb.2018.11.007

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