Structural and XPS characterization of ALD Al2O3 coated porous silicon

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Title
Structural and XPS characterization of ALD Al2O3 coated porous silicon
Authors
Keywords
Atomic layer deposition, Aluminum oxide, Porous silicon, XPS
Journal
VACUUM
Volume 113, Issue -, Pages 52-58
Publisher
Elsevier BV
Online
2014-12-24
DOI
10.1016/j.vacuum.2014.12.015

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