Thickness-dependent ferroelectric properties of HfO2/ZrO2 nanolaminates using atomic layer deposition
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Title
Thickness-dependent ferroelectric properties of HfO2/ZrO2 nanolaminates using atomic layer deposition
Authors
Keywords
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Journal
Journal of Materials Science
Volume -, Issue -, Pages -
Publisher
Springer Science and Business Media LLC
Online
2021-01-04
DOI
10.1007/s10853-020-05680-6
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