Effects of CMP slurry additives on the agglomeration of alumina nanoparticles 1: General aggregation rate behavior

Published 2013 View Full Article

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Title
Effects of CMP slurry additives on the agglomeration of alumina nanoparticles 1: General aggregation rate behavior
Authors
Keywords
-
Journal
JOURNAL OF COLLOID AND INTERFACE SCIENCE
Volume 419, Issue -, Pages 56-60
Publisher
Elsevier BV
Online
2013-12-20
DOI
10.1016/j.jcis.2013.12.029

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