Dielectric, energy storage, and loss study of antiferroelectric-like Al-doped HfO2 thin films
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Title
Dielectric, energy storage, and loss study of antiferroelectric-like Al-doped HfO2 thin films
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 117, Issue 22, Pages 221104
Publisher
AIP Publishing
Online
2020-12-03
DOI
10.1063/5.0029706
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