Origin of Ferroelectric Phase in Undoped HfO 2 Films Deposited by Sputtering

Published 2019 View Full Article

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Title
Origin of Ferroelectric Phase in Undoped HfO 2 Films Deposited by Sputtering
Authors
Keywords
-
Journal
Advanced Materials Interfaces
Volume -, Issue -, Pages 1901528
Publisher
Wiley
Online
2019-10-01
DOI
10.1002/admi.201901528

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