- Home
- Publications
- Publication Search
- Publication Details
Title
Re-distribution of oxygen at the interface between γ-Al2O3 and TiN
Authors
Keywords
-
Journal
Scientific Reports
Volume 7, Issue 1, Pages -
Publisher
Springer Nature
Online
2017-06-27
DOI
10.1038/s41598-017-04804-4
References
Ask authors/readers for more resources
Related references
Note: Only part of the references are listed.- Metallization-Induced Oxygen Deficiency of γ-Al2O3 Layers
- (2016) Elena O. Filatova et al. Journal of Physical Chemistry C
- Interpretation of the Changing the Band Gap of Al2O3 Depending on Its Crystalline Form: Connection with Different Local Symmetries
- (2015) Elena O. Filatova et al. Journal of Physical Chemistry C
- Mechanism of Date Retention Improvement by High Temperature Annealing of Al2O3Blocking Layer in Flash Memory Device
- (2013) Jong Kyung Park et al. JAPANESE JOURNAL OF APPLIED PHYSICS
- X-ray spectroscopic study of SrTiOx films with different interlayers
- (2013) E. O. Filatova et al. JOURNAL OF APPLIED PHYSICS
- Modulation of electron barriers between TiNxand oxide insulators (SiO2, Al2O3) using Ti interlayer
- (2013) Francesca De Stefano et al. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
- Study of Al2O3 nanolayers synthesized onto porous SiO2 using X-ray reflection spectroscopy
- (2013) A.S. Konashuk et al. THIN SOLID FILMS
- Investigation of the band offsets caused by thin Al2O3 layers in HfO2 based Si metal oxide semiconductor devices
- (2012) Lior Kornblum et al. APPLIED PHYSICS LETTERS
- Significant increase in conduction band discontinuity due to solid phase epitaxy of Al2O3 gate insulator films on GaN semiconductor
- (2012) S. Toyoda et al. APPLIED PHYSICS LETTERS
- A complete and self-consistent evaluation of XPS spectra of TiN
- (2012) Dominik Jaeger et al. JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA
- Effects of high-temperature O2annealing on Al2O3blocking layer and Al2O3/Si3N4interface for MANOS structures
- (2012) Zhongguang Xu et al. JOURNAL OF PHYSICS D-APPLIED PHYSICS
- Soft x-ray reflectometry, hard x-ray photoelectron spectroscopy and transmission electron microscopy investigations of the internal structure of TiO2(Ti)/SiO2/Si stacks
- (2012) Elena O Filatova et al. SCIENCE AND TECHNOLOGY OF ADVANCED MATERIALS
- The influence of porous silica substrate on the properties of alumina films studied by X-ray reflection spectroscopy
- (2012) A. S. Konashuk et al. TECHNICAL PHYSICS LETTERS
- TiNx/HfO2 interface dipole induced by oxygen scavenging
- (2011) V. V. Afanas’ev et al. APPLIED PHYSICS LETTERS
- Influence of Al2O3 crystallization on band offsets at interfaces with Si and TiNx
- (2011) V. V. Afanas'ev et al. APPLIED PHYSICS LETTERS
- Towards barrier height modulation in HfO2/TiN by oxygen scavenging – Dielectric defects or metal induced gap states?
- (2011) Luigi Pantisano et al. MICROELECTRONIC ENGINEERING
- Modulations in effective work function of platinum gate electrode in metal-oxide-semiconductor devices
- (2011) S. V. Jagadeesh Chandra et al. THIN SOLID FILMS
- Controlled Nitrogen Doping and Film Colorimetrics in Porous TiO2 Materials Using Plasma Processing
- (2010) Daniel J. V. Pulsipher et al. ACS Applied Materials & Interfaces
- Applying Complementary Trap Characterization Technique to Crystalline $\gamma$-Phase-$\hbox{Al}_{2} \hbox{O}_{3}$ for Improved Understanding of Nonvolatile Memory Operation and Reliability
- (2010) Mohammed B. Zahid et al. IEEE TRANSACTIONS ON ELECTRON DEVICES
- Enhancement in interface robustness regarding thermal oxidation in nanostructured Al2O3 deposited on 4H-SiC
- (2009) S. A. Corrêa et al. APPLIED PHYSICS LETTERS
- High-k dielectrics for future generation memory devices (Invited Paper)
- (2009) J.A. Kittl et al. MICROELECTRONIC ENGINEERING
- The high kinetic energy photoelectron spectroscopy facility at BESSY progress and first results
- (2009) M. Gorgoi et al. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT
- Ab initiostudy of the physical properties ofγ-Al2O3: Lattice dynamics, bulk properties, electronic structure, bonding, optical properties, and ELNES/XANES spectra
- (2008) W. Y. Ching et al. PHYSICAL REVIEW B
Discover Peeref hubs
Discuss science. Find collaborators. Network.
Join a conversationBecome a Peeref-certified reviewer
The Peeref Institute provides free reviewer training that teaches the core competencies of the academic peer review process.
Get Started