Integrated Piezoelectric AlN Thin Film with SU-8/PDMS Supporting Layer for Flexible Sensor Array

Theoretical analysis and experimental study of the effect of the neutral plane of a composite piezoelectric cantilever

(2018) Yang Hong et al.   ENERGY CONVERSION AND MANAGEMENT

Artificial Tactile Sensor Structure for Surface Topography through Sliding

(2018) Kwonsik Shin et al.   IEEE-ASME TRANSACTIONS ON MECHATRONICS

Piezoelectric MEMS with tactile stimulation and displacement sensing functions

(2018) Kensuke Kanda et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Piezoelectric ultra-sensitive aluminum nitride thin film on flexible aluminum substrate

(2017) H. Bishara et al.   JOURNAL OF MATERIALS SCIENCE

Pulse-Echo Ultrasound Imaging Using an AlN Piezoelectric Micromachined Ultrasonic Transducer Array With Transmit Beam-Forming

(2016) Yipeng Lu et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Flexible piezoelectric micromachined ultrasonic transducer (pMUT) for application in brain stimulation

(2016) Jin-Hyung Lee et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

A high-sensitivity tactile sensor based on piezoelectric polymer PVDF coupled to an ultra-low voltage organic transistor

(2016) A. Spanu et al.   ORGANIC ELECTRONICS

An ultra-sensitive and rapid response speed graphene pressure sensors for electronic skin and health monitoring

(2016) Zheng Lou et al.   Nano Energy

Micropatterned P(VDF-TrFE) Film-Based Piezoelectric Nanogenerators for Highly Sensitive Self-Powered Pressure Sensors

(2015) Ju-Hyuck Lee et al.   ADVANCED FUNCTIONAL MATERIALS

AlN texturing and piezoelectricity on flexible substrates for sensor applications

(2015) Emanuele Smecca et al.   APPLIED PHYSICS LETTERS

Low stiffness tactile transducers based on AlN thin film and polyimide

(2015) V. M. Mastronardi et al.   APPLIED PHYSICS LETTERS

Experiment and simulation validated analytical equivalent circuit model for piezoelectric micromachined ultrasonic transducers

(2015) Katherine Smyth et al.   IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL

Quantitative and high spatial resolution d33 measurement of piezoelectric bulk and thin films

(2015) Smitha Shetty et al.   JOURNAL OF APPLIED PHYSICS

Fully flexible and transparent piezoelectric touch sensors based on ZnO nanowires and BaTiO3-added SiO2capping layers

(2015) MoolKyul Kang et al.   PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE

Highly Sensitive and Multifunctional Tactile Sensor Using Free-standing ZnO/PVDF Thin Film with Graphene Electrodes for Pressure and Temperature Monitoring

(2015) James S. Lee et al.   Scientific Reports

Flexible, Stretchable and Wearable Multifunctional Sensor Array as Artificial Electronic Skin for Static and Dynamic Strain Mapping

(2015) Xiaoli Zhao et al.   Advanced Electronic Materials

Self-Powered Cardiac Pacemaker Enabled by Flexible Single Crystalline PMN-PT Piezoelectric Energy Harvester

(2014) Geon-Tae Hwang et al.   ADVANCED MATERIALS

SU-8 as a material for lab-on-a-chip-based mass spectrometry

(2014) Steve Arscott   LAB ON A CHIP

Piezoelectric ultrasonic transducer based on flexible AlN

(2014) Vincenzo Mariano Mastronardi et al.   MICROELECTRONIC ENGINEERING

Conformable amplified lead zirconate titanate sensors with enhanced piezoelectric response for cutaneous pressure monitoring

(2014) Canan Dagdeviren et al.   Nature Communications

Transfer of thin Au films to polydimethylsiloxane (PDMS) with reliable bonding using (3-mercaptopropyl)trimethoxysilane (MPTMS) as a molecular adhesive

(2013) Ikjoo Byun et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

In vitro and in vivo evaluation of SU-8 biocompatibility

(2013) Krishnamurthy V. Nemani et al.   Materials Science & Engineering C-Materials for Biological Applications

Flexible PZT Thin Film Tactile Sensor for Biomedical Monitoring

(2013) Hong-Jie Tseng et al.   SENSORS

Tactile multisensing on flexible aluminum nitride

(2012) Simona Petroni et al.   ANALYST

SU-8 2002 Surface Micromachined Deformable Membrane Mirrors

(2012) Sarah J. Lukes et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Piezoelectric aluminum nitride thin films for microelectromechanical systems

(2012) Gianluca Piazza et al.   MRS BULLETIN

A review of tactile sensing technologies with applications in biomedical engineering

(2012) Mohsin I. Tiwana et al.   SENSORS AND ACTUATORS A-PHYSICAL

A capacitive tactile sensor array for surface texture discrimination

(2011) H.B. Muhammad et al.   MICROELECTRONIC ENGINEERING

Electromechanical characterization of piezoelectric PVDF polymer films for tactile sensors in robotics applications

(2011) Lucia Seminara et al.   SENSORS AND ACTUATORS A-PHYSICAL

Large-Area Nanocontact Printing with Metallic Nanostencil Masks

(2010) Min Hyung Lee et al.   ANGEWANDTE CHEMIE-INTERNATIONAL EDITION

Highly Strained Compliant Optical Metamaterials with Large Frequency Tunability

(2010) Imogen M. Pryce et al.   NANO LETTERS

A piezoresistive tactile sensor based on carbon fibers and polymer substrates

(2009) Chang-Sin Park et al.   MICROELECTRONIC ENGINEERING

Polymer-based flexible tactile sensor up to 32×32 arrays integrated with interconnection terminals

(2009) Kunnyun Kim et al.   SENSORS AND ACTUATORS A-PHYSICAL

Normal and Shear Force Measurement Using a Flexible Polymer Tactile Sensor With Embedded Multiple Capacitors

(2008) Hyung-Kew Lee et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Flexible Dome and Bump Shape Piezoelectric Tactile Sensors Using PVDF-TrFE Copolymer

(2008) Chunyan Li et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

PVDF-Based Microfabricated Tactile Sensor for Minimally Invasive Surgery

(2008) M.A. Qasaimeh et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS