Piezoelectric MEMS with tactile stimulation and displacement sensing functions

Published 2018 View Full Article

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Title
Piezoelectric MEMS with tactile stimulation and displacement sensing functions
Authors
Keywords
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 57, Issue 11S, Pages 11UF14
Publisher
Japan Society of Applied Physics
Online
2018-10-05
DOI
10.7567/jjap.57.11uf14

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