Room-temperature deposition of ferroelectric HfO2-based films by the sputtering method
Published 2020 View Full Article
- Home
- Publications
- Publication Search
- Publication Details
Title
Room-temperature deposition of ferroelectric HfO2-based films by the sputtering method
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 116, Issue 6, Pages 062901
Publisher
AIP Publishing
Online
2020-02-11
DOI
10.1063/1.5140612
References
Ask authors/readers for more resources
Related references
Note: Only part of the references are listed.- Effects of heat treatment and in situ high-temperature X-ray diffraction study on the formation of ferroelectric epitaxial Y-doped HfO2 film
- (2019) Takanori Mimura et al. JAPANESE JOURNAL OF APPLIED PHYSICS
- Composition-Dependent Ferroelectric Properties in Sputtered HfXZr1−XO2 Thin Films
- (2019) Qing Luo et al. IEEE ELECTRON DEVICE LETTERS
- Ferroelectricity in YO1.5-HfO2 films around 1 μm in thickness
- (2019) Takanori Mimura et al. APPLIED PHYSICS LETTERS
- The effects of small amounts of oxygen during deposition on structural changes in sputtered HfO2-based films
- (2019) Kenshi Takada et al. JAPANESE JOURNAL OF APPLIED PHYSICS
- The effects of oxygen vacancies on ferroelectric phase transition of HfO2-based thin film from first-principle
- (2019) Y. Zhou et al. COMPUTATIONAL MATERIALS SCIENCE
- Origin of Ferroelectric Phase in Undoped HfO 2 Films Deposited by Sputtering
- (2019) Terence Mittmann et al. Advanced Materials Interfaces
- A comprehensive study on the mechanism of ferroelectric phase formation in hafnia-zirconia nanolaminates and superlattices
- (2019) Min Hyuk Park et al. Applied Physics Reviews
- Polarization switching behavior of Hf–Zr–O ferroelectric ultrathin films studied through coercive field characteristics
- (2018) Shinji Migita et al. JAPANESE JOURNAL OF APPLIED PHYSICS
- Ferroelectricity mediated by ferroelastic domain switching in HfO2-based epitaxial thin films
- (2018) Takao Shimizu et al. APPLIED PHYSICS LETTERS
- Epitaxial ferroelectric Y-doped HfO2 film grown by the RF magnetron sputtering
- (2018) Taisei Suzuki et al. JAPANESE JOURNAL OF APPLIED PHYSICS
- Formation of (111) orientation-controlled ferroelectric orthorhombic HfO2 thin films from solid phase via annealing
- (2016) Takanori Mimura et al. APPLIED PHYSICS LETTERS
- Evolution of microstructural and electrical properties of sputtered HfO2 ceramic thin films with RF power and substrate temperature
- (2016) K.C. Das et al. CERAMICS INTERNATIONAL
- Growth of epitaxial orthorhombic YO1.5-substituted HfO2 thin film
- (2015) Takao Shimizu et al. APPLIED PHYSICS LETTERS
- On the structural origins of ferroelectricity in HfO2 thin films
- (2015) Xiahan Sang et al. APPLIED PHYSICS LETTERS
- Ferroelectric Hafnium Oxide Based Materials and Devices: Assessment of Current Status and Future Prospects
- (2015) J. Muller et al. ECS Journal of Solid State Science and Technology
- Impact of different dopants on the switching properties of ferroelectric hafniumoxide
- (2014) Uwe Schroeder et al. JAPANESE JOURNAL OF APPLIED PHYSICS
- Pathways towards ferroelectricity in hafnia
- (2014) Tran Doan Huan et al. PHYSICAL REVIEW B
- Activated Solutions Enabling Low-Temperature Processing of Functional Ferroelectric Oxides for Flexible Electronics
- (2013) Iñigo Bretos et al. ADVANCED MATERIALS
- Evolution of phases and ferroelectric properties of thin Hf0.5Zr0.5O2 films according to the thickness and annealing temperature
- (2013) Min Hyuk Park et al. APPLIED PHYSICS LETTERS
- A study on structural, optical and hydrophobic properties of oblique angle sputter deposited HfO2 films
- (2013) Ravish K. Jain et al. APPLIED SURFACE SCIENCE
- Co-sputtering yttrium into hafnium oxide thin films to produce ferroelectric properties
- (2012) T. Olsen et al. APPLIED PHYSICS LETTERS
- Ferroelectricity in hafnium oxide thin films
- (2011) T. S. Böscke et al. APPLIED PHYSICS LETTERS
- Development of hafnium based high-k materials—A review
- (2011) J.H. Choi et al. MATERIALS SCIENCE & ENGINEERING R-REPORTS
Add your recorded webinar
Do you already have a recorded webinar? Grow your audience and get more views by easily listing your recording on Peeref.
Upload NowAsk a Question. Answer a Question.
Quickly pose questions to the entire community. Debate answers and get clarity on the most important issues facing researchers.
Get Started