Formation of (111) orientation-controlled ferroelectric orthorhombic HfO2 thin films from solid phase via annealing

Title
Formation of (111) orientation-controlled ferroelectric orthorhombic HfO2 thin films from solid phase via annealing
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 109, Issue 5, Pages 052903
Publisher
AIP Publishing
Online
2016-08-05
DOI
10.1063/1.4960461

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