Effective Passivation of Black Silicon Surfaces via Plasma‐Enhanced Chemical Vapor Deposition Grown Conformal Hydrogenated Amorphous Silicon Layer

Title
Effective Passivation of Black Silicon Surfaces via Plasma‐Enhanced Chemical Vapor Deposition Grown Conformal Hydrogenated Amorphous Silicon Layer
Authors
Keywords
-
Journal
Physica Status Solidi-Rapid Research Letters
Volume -, Issue -, Pages 1900087
Publisher
Wiley
Online
2019-10-25
DOI
10.1002/pssr.201900087

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