Role of hydrogen bonding environment in a-Si:H films for c-Si surface passivation

Published 2008 View Full Article

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Title
Role of hydrogen bonding environment in a-Si:H films for c-Si surface passivation
Authors
Keywords
-
Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 26, Issue 4, Pages 683-687
Publisher
American Vacuum Society
Online
2008-09-18
DOI
10.1116/1.2897929

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