Preparation of composite micro/nano structure on the silicon surface by reactive ion etching: Enhanced anti-reflective and hydrophobic properties

Published 2018 View Full Article

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Title
Preparation of composite micro/nano structure on the silicon surface by reactive ion etching: Enhanced anti-reflective and hydrophobic properties
Authors
Keywords
Composite micro/nano structure, Wet chemical etching, Reactive ion etching(RIE), Anti-reflection, Hydrophobicity
Journal
SUPERLATTICES AND MICROSTRUCTURES
Volume 117, Issue -, Pages 144-154
Publisher
Elsevier BV
Online
2018-03-19
DOI
10.1016/j.spmi.2018.03.035

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