Reduction of capacitive coupling in inductively coupled plasmas by solenoid coils on dielectric window

Effects of antenna coil turns on plasma density and antenna voltage in solenoidal inductively coupled plasmas

(2016) Jun-Hyeon Moon et al.   PHYSICS OF PLASMAS

Understanding Microwave Surface-Wave Sustained Plasmas at Intermediate Pressure by 2D Modeling and Experiments

(2016) Violeta Georgieva et al.   Plasma Processes and Polymers

Equivalent circuit effects on mode transitions in H2 inductively coupled plasmas

(2015) Hui-Jing Xu et al.   PHYSICS OF PLASMAS

Effects of capacitor termination to an antenna coil on the plasma parameters in a radio frequency inductively coupled plasma

(2013) Duksun Han et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Fast 2D hybrid fluid-analytical simulation of inductive/capacitive discharges

(2011) E Kawamura et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Effect of Capacitor Installed in Series With a Ferrite-Enhanced Internal Linear-Type Antenna on the Properties of an Inductively Coupled Plasma

(2010) Gwang Ho Gweon et al.   IEEE TRANSACTIONS ON PLASMA SCIENCE

Sputtering yields of compounds using argon ions

(2010) M P Seah et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Fluid simulation of the E-H mode transition in inductively coupled plasma

(2009) Shu-Xia Zhao et al.   JOURNAL OF APPLIED PHYSICS

Plasma power measurement and hysteresis in the E–H transition of a rf inductively coupled plasma system

(2008) A. M. Daltrini et al.   APPLIED PHYSICS LETTERS