Understanding Microwave Surface-Wave Sustained Plasmas at Intermediate Pressure by 2D Modeling and Experiments
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Title
Understanding Microwave Surface-Wave Sustained Plasmas at Intermediate Pressure by 2D Modeling and Experiments
Authors
Keywords
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Journal
Plasma Processes and Polymers
Volume 14, Issue 4-5, Pages 1600185
Publisher
Wiley
Online
2016-11-17
DOI
10.1002/ppap.201600185
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