Effects of antenna coil turns on plasma density and antenna voltage in solenoidal inductively coupled plasmas

Published 2016 View Full Article

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Title
Effects of antenna coil turns on plasma density and antenna voltage in solenoidal inductively coupled plasmas
Authors
Keywords
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Journal
PHYSICS OF PLASMAS
Volume 23, Issue 11, Pages 113504
Publisher
AIP Publishing
Online
2016-11-19
DOI
10.1063/1.4967772
References
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