Characteristics of low-resistivity aluminum-doped zinc oxide films deposited at room temperature by off-axis radio-frequency sputtering on flexible plastic substrates

Title
Characteristics of low-resistivity aluminum-doped zinc oxide films deposited at room temperature by off-axis radio-frequency sputtering on flexible plastic substrates
Authors
Keywords
Optical Bandgap Energy, Bandgap Renormalization, Flexible Plastic Substrate, Flexible Polymer Substrate, Crystallite Size Effect
Journal
Publisher
Springer Nature
Online
2016-07-12
DOI
10.1007/s00339-016-0250-1

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