Enhanced electrical and optical properties of room temperature deposited Aluminium doped Zinc Oxide (AZO) thin films by excimer laser annealing

Published 2016 View Full Article

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Title
Enhanced electrical and optical properties of room temperature deposited Aluminium doped Zinc Oxide (AZO) thin films by excimer laser annealing
Authors
Keywords
Transparent conductive oxide, Al-doped zinc oxide, RF-magnetron sputtering, Excimer laser annealing
Journal
OPTICS AND LASERS IN ENGINEERING
Volume 80, Issue -, Pages 45-51
Publisher
Elsevier BV
Online
2016-01-14
DOI
10.1016/j.optlaseng.2015.12.010

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