Seed‐Layer‐Free Atomic Layer Deposition of Highly Uniform Al 2 O 3 Thin Films onto Monolayer Epitaxial Graphene on Silicon Carbide
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Title
Seed‐Layer‐Free Atomic Layer Deposition of Highly Uniform Al
2
O
3
Thin Films onto Monolayer Epitaxial Graphene on Silicon Carbide
Authors
Keywords
-
Journal
Advanced Materials Interfaces
Volume 6, Issue 10, Pages 1900097
Publisher
Wiley
Online
2019-04-18
DOI
10.1002/admi.201900097
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