Advances in Capacitive Micromachined Ultrasonic Transducers

Fabrication and testing of polymer-based capacitive micromachined ultrasound transducers for medical imaging

(2018) Carlos D. Gerardo et al.   Microsystems & Nanoengineering

Sensitivity Optimization of Wafer Bonded Gravimetric CMUT Sensors

(2018) Mathias J. G. Molgaard et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

A Reduced-Wire ICE Catheter ASIC With Tx Beamforming and Rx Time-Division Multiplexing

(2018) Gwangrok Jung et al.   IEEE Transactions on Biomedical Circuits and Systems

A Front-End ASIC With Receive Sub-array Beamforming Integrated With a $32 \times 32$ PZT Matrix Transducer for 3-D Transesophageal Echocardiography

(2017) Chao Chen et al.   IEEE JOURNAL OF SOLID-STATE CIRCUITS

Towards a Reduced-Wire Interface for CMUT-Based Intravascular Ultrasound Imaging Systems

(2017) Jaemyung Lim et al.   IEEE Transactions on Biomedical Circuits and Systems

A Comparative Analysis of CMUT Receiving Architectures for the Design Optimization of Integrated Transceiver Front Ends

(2017) Marco Sautto et al.   IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL

Development of a Novel Transparent Flexible Capacitive Micromachined Ultrasonic Transducer

(2017) et al.   SENSORS

Monolithic ultrasound fingerprint sensor

(2017) Xiaoyue Jiang et al.   Microsystems & Nanoengineering

First In Vivo Use of a Capacitive Micromachined Ultrasound Transducer Array-Based Imaging and Ablation Catheter

(2017) Douglas N. Stephens et al.   JOURNAL OF ULTRASOUND IN MEDICINE

4-D ICE: A 2-D Array Transducer With Integrated ASIC in a 10-Fr Catheter for Real-Time 3-D Intracardiac Echocardiography

(2016) Douglas Wildes et al.   IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL

Ultrasonic fingerprint sensor using a piezoelectric micromachined ultrasonic transducer array integrated with complementary metal oxide semiconductor electronics

(2015) Y. Lu et al.   APPLIED PHYSICS LETTERS

A three-mask process for fabricating vacuum-sealed capacitive micromachined ultrasonic transducers using anodic bonding

(2015) F. Yalcın Yamaner et al.   IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL

3-D imaging using row–column-addressed arrays with integrated apodization— part ii: transducer fabrication and experimental results

(2015) Thomas Lehrmann Christiansen et al.   IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL

CMUTs with high-K atomic layer deposition dielectric material insulation layer

(2014) Toby Xu et al.   IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL

Top-orthogonal-to-bottom-electrode (TOBE) CMUT arrays for 3-D ultrasound imaging

(2014) Alex Sampaleanu et al.   IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL

Single-chip CMUT-on-CMOS front-end system for real-time volumetric IVUS and ICE imaging

(2014) Gokce Gurun et al.   IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL

Ultrasonic Imaging Transceiver Design for CMUT: A Three-Level 30-Vpp Pulse-Shaping Pulser With Improved Efficiency and a Noise-Optimized Receiver

(2013) Kailiang Chen et al.   IEEE JOURNAL OF SOLID-STATE CIRCUITS

A comparison between conventional and collapse-mode capacitive micromachined ultrasonic transducers in 10-MHz 1-D arrays

(2013) Kwan Kyu Park et al.   IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL

Monolithic CMUT-on-CMOS integration for intravascular ultrasound applications

(2012) Jaime Zahorian et al.   IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL

Volumetric real-time imaging using a CMUT ring array

(2012) Jung Woo Choe et al.   IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL

A CMUT probe for medical ultrasonography: from microfabrication to system integration

(2012) A. S. Savoia et al.   IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL

Front-end receiver electronics for high-frequency monolithic CMUT-on-CMOS imaging arrays

(2011) G. Gurun et al.   IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL

A 32 x 32 element row-column addressed capacitive micromachined ultrasonic transducer

(2011) A S Logan et al.   IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL

Fabrication of Capacitive Micromachined Ultrasonic Transducers via Local Oxidation and Direct Wafer Bonding

(2011) Kwan Kyu Park et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Nanoscale Topography of Thermally-Grown Oxide Films at Right-Angled Convex Corners of Silicon

(2011) A. Fatih Sarioglu et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

A dual-layer transducer array for 3-D rectilinear imaging

(2009) J.T. Yen et al.   IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL

Fabricating capacitive micromachined ultrasonic transducers with a novel silicon-nitride-Based wafer bonding process

(2009) A. Logan et al.   IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL

A 256 x 256 2-D array transducer with row-column addressing for 3-D rectilinear imaging

(2009) Chi Hyung Seo et al.   IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL

Capacitive micromachined ultrasonic transducers with piston-shaped membranes: fabrication and experimental characterization

(2009) Yongli Huang et al.   IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL

Integration of 2D CMUT arrays with front-end electronics for volumetric ultrasound imaging

(2008) I.O. Wygant et al.   IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL

Fabrication of Flexible Transducer Arrays With Through-Wafer Electrical Interconnects Based on Trench Refilling With PDMS

(2008) Xuefeng Zhuang et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

High-Intensity Focused Ultrasound: Current Potential and Oncologic Applications

(2007) Theodore J. Dubinsky et al.   AMERICAN JOURNAL OF ROENTGENOLOGY