CMUTs with high-K atomic layer deposition dielectric material insulation layer

Published 2014 View Full Article

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Title
CMUTs with high-K atomic layer deposition dielectric material insulation layer
Authors
Keywords
-
Journal
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL
Volume 61, Issue 12, Pages 2121-2131
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2014-12-05
DOI
10.1109/tuffc.2014.006481

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