A three-mask process for fabricating vacuum-sealed capacitive micromachined ultrasonic transducers using anodic bonding

Published 2015 View Full Article

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Title
A three-mask process for fabricating vacuum-sealed capacitive micromachined ultrasonic transducers using anodic bonding
Authors
Keywords
-
Journal
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL
Volume 62, Issue 5, Pages 972-982
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2015-05-14
DOI
10.1109/tuffc.2014.006794

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