Fabrication of Capacitive Micromachined Ultrasonic Transducers via Local Oxidation and Direct Wafer Bonding

Published 2011 View Full Article

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Title
Fabrication of Capacitive Micromachined Ultrasonic Transducers via Local Oxidation and Direct Wafer Bonding
Authors
Keywords
-
Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 20, Issue 1, Pages 95-103
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2011-01-11
DOI
10.1109/jmems.2010.2093567

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