Sensitivity Optimization of Wafer Bonded Gravimetric CMUT Sensors

Title
Sensitivity Optimization of Wafer Bonded Gravimetric CMUT Sensors
Authors
Keywords
-
Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume -, Issue -, Pages 1-8
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2018-09-15
DOI
10.1109/jmems.2018.2868864

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