Ultrafast Assembly of PS-PDMS Block Copolymers on 300 mm Wafers by Blending with Plasticizers
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Title
Ultrafast Assembly of PS-PDMS Block Copolymers on 300 mm Wafers by Blending with Plasticizers
Authors
Keywords
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Journal
ADVANCED FUNCTIONAL MATERIALS
Volume 26, Issue 31, Pages 5690-5700
Publisher
Wiley
Online
2016-06-07
DOI
10.1002/adfm.201601469
References
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- (2015) Weihua Li et al. Annual Review of Chemical and Biomolecular Engineering
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- (2015) Saman Safari Dinachali et al. ACS Macro Letters
- A vertical lamellae arrangement of sub-16 nm pitch (domain spacing) in a microphase separated PS-b-PEO thin film by salt addition
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- (2013) Christophe Sinturel et al. MACROMOLECULES
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- (2013) Seong-Jun Jeong et al. Materials Today
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