Ultrafast Assembly of PS-PDMS Block Copolymers on 300 mm Wafers by Blending with Plasticizers

标题
Ultrafast Assembly of PS-PDMS Block Copolymers on 300 mm Wafers by Blending with Plasticizers
作者
关键词
-
出版物
ADVANCED FUNCTIONAL MATERIALS
Volume 26, Issue 31, Pages 5690-5700
出版商
Wiley
发表日期
2016-06-07
DOI
10.1002/adfm.201601469

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