Metallic Copper Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition of Air Stable Precursors 

Precursor design and reaction mechanisms for the atomic layer deposition of metal films

(2013) Karla Bernal Ramos et al.   COORDINATION CHEMISTRY REVIEWS

Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends

(2013) Ville Miikkulainen et al.   JOURNAL OF APPLIED PHYSICS

One-dimensional CuO–SnO2 p–n heterojunctions for enhanced detection of H2S

(2013) Irina Giebelhaus et al.   Journal of Materials Chemistry A

Effects of the substrate temperature on the Cu seed layer formed using atomic layer deposition

(2011) Dae-Yong Moon et al.   THIN SOLID FILMS

Behavior of Cu nanoparticles ink under reductive calcination for fabrication of Cu conductive film

(2011) Kiyonobu Ida et al.   THIN SOLID FILMS

Resolving surface chemical states in XPS analysis of first row transition metals, oxides and hydroxides: Sc, Ti, V, Cu and Zn

(2010) Mark C. Biesinger et al.   APPLIED SURFACE SCIENCE

Investigation of AlMe3, BEt3, and ZnEt2as Co-Reagents for Low-Temperature Copper Metal ALD/Pulsed-CVD

(2010) Balamurugan Vidjayacoumar et al.   CHEMISTRY OF MATERIALS

Growth of Cu Metal Films at Room Temperature Using Catalyzed Reactions

(2010) Sang-Woo Kang et al.   CHEMISTRY OF MATERIALS

Surface and Interface Processes during Atomic Layer Deposition of Copper on Silicon Oxide

(2010) Min Dai et al.   LANGMUIR

Atomic Layer Deposition: An Overview

(2009) Steven M. George   CHEMICAL REVIEWS

Copper Oxide Films Grown by Atomic Layer Deposition from Bis(tri-n-butylphosphane)copper(I)acetylacetonate on Ta, TaN, Ru, and SiO[sub 2]

(2009) Thomas Waechtler et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Oxidation of Polycrystalline Copper Thin Films at Ambient Conditions

(2008) Ilia Platzman et al.   Journal of Physical Chemistry C

Effect of post-annealing on the properties of copper oxide thin films obtained from the oxidation of evaporated metallic copper

(2007) V. Figueiredo et al.   APPLIED SURFACE SCIENCE