Investigation of AlMe3, BEt3, and ZnEt2as Co-Reagents for Low-Temperature Copper Metal ALD/Pulsed-CVD

Title
Investigation of AlMe3, BEt3, and ZnEt2as Co-Reagents for Low-Temperature Copper Metal ALD/Pulsed-CVD
Authors
Keywords
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Journal
CHEMISTRY OF MATERIALS
Volume 22, Issue 17, Pages 4844-4853
Publisher
American Chemical Society (ACS)
Online
2010-08-11
DOI
10.1021/cm101442e

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