A study of chemical products formed on sapphire (0001) during chemical–mechanical polishing

Published 2015 View Full Article

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Title
A study of chemical products formed on sapphire (0001) during chemical–mechanical polishing
Authors
Keywords
Sapphire substrate, Chemical–mechanical polishing, Step-terrace structure, Chemical products, Material removal mechanism
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 270, Issue -, Pages 206-220
Publisher
Elsevier BV
Online
2015-03-08
DOI
10.1016/j.surfcoat.2015.02.053

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