Atomic layer deposition of lithium nitride and carbonate using lithium silylamide

Title
Atomic layer deposition of lithium nitride and carbonate using lithium silylamide
Authors
Keywords
-
Journal
RSC Advances
Volume 2, Issue 15, Pages 6315
Publisher
Royal Society of Chemistry (RSC)
Online
2012-06-14
DOI
10.1039/c2ra20731a

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