Atomic layer deposition of lithium nitride and carbonate using lithium silylamide

标题
Atomic layer deposition of lithium nitride and carbonate using lithium silylamide
作者
关键词
-
出版物
RSC Advances
Volume 2, Issue 15, Pages 6315
出版商
Royal Society of Chemistry (RSC)
发表日期
2012-06-14
DOI
10.1039/c2ra20731a

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