Study of amorphous lithium silicate thin films grown by atomic layer deposition

Title
Study of amorphous lithium silicate thin films grown by atomic layer deposition
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 30, Issue 1, Pages 01A106
Publisher
American Vacuum Society
Online
2011-09-28
DOI
10.1116/1.3643349

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