Atomic Layer Deposition of Li2O–Al2O3Thin Films

Published 2011 View Full Article

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Title
Atomic Layer Deposition of Li2O–Al2O3Thin Films
Authors
Keywords
-
Journal
CHEMISTRY OF MATERIALS
Volume 23, Issue 21, Pages 4669-4675
Publisher
American Chemical Society (ACS)
Online
2011-10-05
DOI
10.1021/cm200899k

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