Modeling alumina atomic layer deposition reaction kinetics during the trimethylaluminum exposure

Modeling ALD Surface Reaction and Process Dynamics using Absolute Reaction Rate Theory

(2013) Curtisha D. Travis et al.   CHEMICAL VAPOR DEPOSITION

Dynamic Modeling for the Design and Cyclic Operation of an Atomic Layer Deposition (ALD) Reactor

(2013) Curtisha Travis et al.   Processes

Atomic Layer Deposition of Nanostructured Materials for Energy and Environmental Applications

(2012) Catherine Marichy et al.   ADVANCED MATERIALS

Emerging Applications of Atomic Layer Deposition for Lithium-Ion Battery Studies

(2012) Xiangbo Meng et al.   ADVANCED MATERIALS

A model-based methodology for the analysis and design of atomic layer deposition processes—Part I: Mechanistic modelling of continuous flow reactors

(2012) A. Holmqvist et al.   CHEMICAL ENGINEERING SCIENCE

A model-based methodology for the analysis and design of atomic layer deposition processes—Part II:

(2012) A. Holmqvist et al.   CHEMICAL ENGINEERING SCIENCE

Atomic layer deposition: medical and biological applications

(2012) S. A. Skoog et al.   INTERNATIONAL MATERIALS REVIEWS

Atomic-scale simulation of ALD chemistry

(2012) Simon D Elliott   SEMICONDUCTOR SCIENCE AND TECHNOLOGY

Atomic layer deposition for photovoltaics: applications and prospects for solar cell manufacturing

(2012) J A van Delft et al.   SEMICONDUCTOR SCIENCE AND TECHNOLOGY

Atomic Layer Deposition of Aluminum Oxide on TiO2 and Its Impact on N3 Dye Adsorption from First Principles

(2011) Ville Mäkinen et al.   Journal of Physical Chemistry C

Simple model for atomic layer deposition precursor reaction and transport in a viscous-flow tubular reactor

(2011) Angel Yanguas-Gil et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Reaction mechanisms for atomic layer deposition of aluminum oxide on semiconductor substrates

(2011) Annelies Delabie et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Atomic Layer Deposition: An Overview

(2009) Steven M. George   CHEMICAL REVIEWS

Density functional theory and beyond—opportunities for quantum methods in materials modeling semiconductor technology

(2008) Sadasivan Shankar et al.   JOURNAL OF PHYSICS-CONDENSED MATTER

Applications of atomic layer deposition to nanofabrication and emerging nanodevices

(2008) Hyungjun Kim et al.   THIN SOLID FILMS