Enhanced performance ofa-IGZO thin-film transistors by forming AZO/IGZO heterojunction source/drain contacts
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Title
Enhanced performance ofa-IGZO thin-film transistors by forming AZO/IGZO heterojunction source/drain contacts
Authors
Keywords
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Journal
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
Volume 26, Issue 5, Pages 055003
Publisher
IOP Publishing
Online
2011-03-15
DOI
10.1088/0268-1242/26/5/055003
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